JPS4828953A - - Google Patents

Info

Publication number
JPS4828953A
JPS4828953A JP46063160A JP6316071A JPS4828953A JP S4828953 A JPS4828953 A JP S4828953A JP 46063160 A JP46063160 A JP 46063160A JP 6316071 A JP6316071 A JP 6316071A JP S4828953 A JPS4828953 A JP S4828953A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP46063160A
Other languages
Japanese (ja)
Other versions
JPS522104B2 (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP46063160A priority Critical patent/JPS522104B2/ja
Publication of JPS4828953A publication Critical patent/JPS4828953A/ja
Publication of JPS522104B2 publication Critical patent/JPS522104B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Non-Adjustable Resistors (AREA)
  • Thermistors And Varistors (AREA)
JP46063160A 1971-08-19 1971-08-19 Expired JPS522104B2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP46063160A JPS522104B2 (en]) 1971-08-19 1971-08-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP46063160A JPS522104B2 (en]) 1971-08-19 1971-08-19

Publications (2)

Publication Number Publication Date
JPS4828953A true JPS4828953A (en]) 1973-04-17
JPS522104B2 JPS522104B2 (en]) 1977-01-19

Family

ID=13221194

Family Applications (1)

Application Number Title Priority Date Filing Date
JP46063160A Expired JPS522104B2 (en]) 1971-08-19 1971-08-19

Country Status (1)

Country Link
JP (1) JPS522104B2 (en])

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4929491A (en]) * 1972-07-20 1974-03-15
JPS4972693A (en]) * 1972-11-17 1974-07-13
JPS5149461A (ja) * 1974-10-26 1976-04-28 Meidensha Electric Mfg Co Ltd Hichokusenteikotai
JPS5149495A (ja) * 1974-10-26 1976-04-28 Meidensha Electric Mfg Co Ltd Hichokusenteikotai
JPS5149463A (ja) * 1974-10-26 1976-04-28 Meidensha Electric Mfg Co Ltd Hichokusenteikotai
JPS51146342U (en]) * 1975-05-19 1976-11-24
JPS58158437U (ja) * 1982-04-16 1983-10-22 昭和電工株式会社 ウエハ−容器
JPS60101949A (ja) * 1983-11-08 1985-06-06 Matsushita Electric Ind Co Ltd 半導体結晶板へき開装置
US7510082B2 (en) 2004-05-19 2009-03-31 Nippon Mining & Metals Co., Ltd. Wafer storage container

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4929491A (en]) * 1972-07-20 1974-03-15
JPS4972693A (en]) * 1972-11-17 1974-07-13
JPS5149461A (ja) * 1974-10-26 1976-04-28 Meidensha Electric Mfg Co Ltd Hichokusenteikotai
JPS5149495A (ja) * 1974-10-26 1976-04-28 Meidensha Electric Mfg Co Ltd Hichokusenteikotai
JPS5149463A (ja) * 1974-10-26 1976-04-28 Meidensha Electric Mfg Co Ltd Hichokusenteikotai
JPS51146342U (en]) * 1975-05-19 1976-11-24
JPS58158437U (ja) * 1982-04-16 1983-10-22 昭和電工株式会社 ウエハ−容器
JPS60101949A (ja) * 1983-11-08 1985-06-06 Matsushita Electric Ind Co Ltd 半導体結晶板へき開装置
US7510082B2 (en) 2004-05-19 2009-03-31 Nippon Mining & Metals Co., Ltd. Wafer storage container

Also Published As

Publication number Publication date
JPS522104B2 (en]) 1977-01-19

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